JPS6291433U - - Google Patents
Info
- Publication number
- JPS6291433U JPS6291433U JP18393385U JP18393385U JPS6291433U JP S6291433 U JPS6291433 U JP S6291433U JP 18393385 U JP18393385 U JP 18393385U JP 18393385 U JP18393385 U JP 18393385U JP S6291433 U JPS6291433 U JP S6291433U
- Authority
- JP
- Japan
- Prior art keywords
- manifold
- ring
- vapor phase
- phase growth
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985183933U JPH0530352Y2 (en]) | 1985-11-28 | 1985-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985183933U JPH0530352Y2 (en]) | 1985-11-28 | 1985-11-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6291433U true JPS6291433U (en]) | 1987-06-11 |
| JPH0530352Y2 JPH0530352Y2 (en]) | 1993-08-03 |
Family
ID=31131125
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985183933U Expired - Lifetime JPH0530352Y2 (en]) | 1985-11-28 | 1985-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0530352Y2 (en]) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS607122A (ja) * | 1983-06-01 | 1985-01-14 | アムテック・システムズ・インコーポレーテッド | 炉中での複数の半導体ウェハを処理する方法および装置 |
| JPS6031000U (ja) * | 1983-08-09 | 1985-03-02 | ウシオ電機株式会社 | 光照射炉 |
-
1985
- 1985-11-28 JP JP1985183933U patent/JPH0530352Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS607122A (ja) * | 1983-06-01 | 1985-01-14 | アムテック・システムズ・インコーポレーテッド | 炉中での複数の半導体ウェハを処理する方法および装置 |
| JPS6031000U (ja) * | 1983-08-09 | 1985-03-02 | ウシオ電機株式会社 | 光照射炉 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0530352Y2 (en]) | 1993-08-03 |